Alumina（Al2O3）
[ALP,HALOX]
Alumina consists of oxidized aluminium and is the most popular among all fine ceramics. In addition to high-purity alumina ceramic ALP series with Al2O3 content 99.5% and 99.9%,HALOX has been newly added to the lineup.
- Electrical Insulating properties
- Wear Resistance
- Heat Resistance
- Corrosion Resistance
- Plasma Resistance
Main Applications
- Semiconductor manufacturing equipment parts (chamber parts, insulation flanges, etching equipment parts, wafer chucks)
- Crusher parts (classifiers, airflow type crushers, beads mills)
- General Industrial parts (nozzles for laser processing machines, shafts, bearings)
- High precision, heat resistant tool (positioning jigs, assembly jigs)
- Wear resistant parts (wire drawing machine guide rollers, yarn paths, rails, guides)
- Electrical insulation parts (insulators, spacers, bushes)
Features
Alumina is usually a white or cream colored ceramics.
Our lineup includes alumina with hight-purities of 99.5%, 99.8%, and 99.9%. Due to its electrical insulating properties, from early on it has been used in various electrical components. Alumina is large amounts are used and it is the least expensive of all fine ceramics. It is also possible to manufacture large products, high purity type has high mechanical strength and excellent corrosion resistance. In addition, it is used for parts of CVD equipment and etching equipment because it is also excellent in plasma resistance.
Alumina
| Material Code | Characte -ristics | Density | Young's Modulus | Flexural Strength | Fracture Toughness | Thermal Expansion RT～800℃ | Thermal Conductivity | Volume Resistivity |
|---|---|---|---|---|---|---|---|---|
| [g/cm3] | [GPa] | [MPa] | [MPa・m1/2] | [×10-6/K] | [W/m・K] | [Ω・cm] | ||
| ALP01 Alumina99.5% |
General Purpose High Rigidity |
3.9 | 370 | 440 | 4 | 8.0 | 33 | ＞1014 |
| ALP02 Alumina99.9% |
High Purity High Rigidity |
3.9 | 370 | 500 | 3 | 8.0 | 30 | ＞1014 |
| HALOX (H580) Alumina99.8% |
General Purpose Large products |
3.9 | 380 | 350 | 4 | 8.0 | 30 | >1014 |
The above property values are not guaranteed values.
For the purpose of improvements, the property values are subject to change without prior notice.
