Thin film resistor
We use Ta2Nx, which is superior in environmental resistance, for the material of thin film resistors. The minimum line width is 20μm.
Details
- Material of resistor: Ta2Nx
- Sheet resistance value: 20Ω/□ , 50Ω/□ , 100Ω/□ , 130Ω/□
- Minimum line width of resistance: 20μm
- Temperature characteristic of resistance: －100±20ppm/℃
- Resistance tolerance: ±10％～ (Regarding tolerance, please consult us.)
