Thin film inductor Inductor is a passive electronic component which stores electrical energy in the form of magnetism. Combining with the thin film capacitor, the LC circuits can be feasible. Details Film composition Ti/Pd/AuTi/Pt/AuTi/Pd/Cu/Ni/Au Minimum line and space Ti/Pd/Au , Ti/Pt/Au 20μm/15μm or more Ti/Pd/Cu/Ni/Au 30μm/20μm or more Accuracy of pattern Ti/Pd/Au , Ti/Pt/Au ±5μm (3μm Au plating thickness) Ti/Pd/Cu/Ni/Au ±5μm (1.5μm Au plating thickness)