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Physical Properties of Substrates

Substrate 99.9%
Alumina
99.5%
Alumina
96%
Alumina
Zirconia
Ceraflex
®-A
Zirconia
Ceraflex
®-8Y
Aluminum Nitride Synthetic Fused Quarts
Material 99.9%Al2O3 99.5%Al2O3 96%Al2O3 3Y-ZrO2 8Y-ZrO2 AlN SiO2

Density
[ g/ ㎤ ]
JISR1634 3.9 3.9 3.8 6.0 5.8 3.3 2.2

Flexural Strength(25℃)
[MPa]
JISR1601 660 440 300 1200 400 330 60
Linear Expansion
Coefficient
(25~800℃)

[1/K]
JISR1618 8 × 10-6 8 × 10-6 8 × 10-6 9.9 × 10-6 9.5 × 10-6 4.6 × 10-6 0.5 × 10-6
Thermal Conductivity
(25℃)

[W/m・K]
JISR1611 33 32 23 3.2 2.8 200
230
Selectable
1.4
Young's Modulus
[GPa]
JISR1602 390 380 340 210 330
Poisson's Ratio
[ - ]
0.25 0.25 0.23 0.31 0.24
Dielectric Constant
(25℃ 1MHz)

[ - ]
9.6 30 25 8.8 3.77
Dielectric Constant
(25℃ 10GHz)

[ - ]
10 9.8
Dissipation Factor
(25℃ 1MHz)

[ - ]
2 × 10-4 4 × 10-3 ≦4 × 10-3 5.0 × 10-4 1 × 10-4
Dissipation Factor
(25℃ 10GHz)

[ - ]
1 × 10-4 1 × 10-4
Volume Resistivity
[Ω・cm]
JISC2141 1015 1015 1014 1012 1012 1012 1016
Surface Roughness*
(As fired)(Ra)

[μm]
0.03 0.1 0.3 0.1 0.1
Standard Thickness
[mm]
0.15
0.25
0.38
0.5~1.0 0.635
0.8
1.0
0.05~1.0 0.1~0.5
1.0
Substrate 99.9%
Alumina
99.5%
Alumina
96%
Alumina
Zirconia
Ceraflex
®-A
Zirconia
Ceraflex
®-8Y
Aluminum Nitride
Synthetic Fused Quarts

Please feel free to make inquiries in regard to other sizes and thicknesses.
In addition, we are able to provide mirror finishing with a surface roughness of Ra=0.02 μm or less using our unique polishing technology.

*The surface roughness is that of the front surface.
The above property values are not guaranteed values.
For the purpose of improvements, the property values are subject to change without prior notice.

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