Al/Si (Infiltration Method)
ーSA001－
- Combined metallic silicon and aluminum by original technology.
- It is lighter than aluminum , has the same rigidity as cast iron, and has low thermal expansion near to ceramic.
- Small lot mass production is possible，Production maximum dimension 1m×0.5m （Upon request）.
Comparison of Characteristic Values
| Density (g/cm3) | Young's Modulus (GPa) | Specific Rigidity | Fracture Toughness （MPa√m） | Thermal Expansion (x10-6/K) | Thermal Conductivity (W/mK) | ||
|---|---|---|---|---|---|---|---|
| MMC | SA001 | 2.4 | 120 | 50 | 3 | 9 | 120 |
| SA301 | 2.8 | 125 | 45 | 15 | 14 | 150 | |
| SA701 | 3.0 | 260 | 87 | 8 | 7 | 160 | |
| A5052 | 2.7 | 70 | 26 | - | 23 | 140 | |
| FA250 | 7.3 | 115 | 16 | - | 10 | 50 | |
| Al2O3 | 3.9 | 370 | 95 | 3 | 7 | 30 | |
The above characteristics are reference values based on publicly available data, our survey results. RT~200℃
Features
- Lightweight : Lighter than aluminum！
- High rigidity : 1.7times of Aluminum！
- Low thermal expansion : Almost equal to cast iron！
Applications
- Electrostatic chuck base plates
- Probe card parts
