Lange coupler
High-frequency signals can be distributed. Our Lange coupler enables manufacturing with line (20μm) and spacing (15μm).With the combination of “air bridge”, the shortest wiring distance can be achieved.
Details
Film composition
- Ti/Pd/Au
- Ti/Pt/Au
- Ti/Pd/Cu/Ni/Au
Minimum line and space
| Ti/Pd/Au , Ti/Pt/Au | 20μm/15μm or more |
|---|---|
| Ti/Pd/Cu/Ni/Au | 30μm/20μm or more |
Accuracy of pattern
| Ti/Pd/Au , Ti/Pt/Au | ±5μm (3μm Au plating thickness) |
|---|---|
| Ti/Pd/Cu/Ni/Au | ±5μm (1.5μm Au plating thickness) |
